Pfeiffer magnetic levitation turbo molecular pump ATH 1600-3200M, ATP 2300M
Shanghai Bodong Germany Pfeiffer MaglevTurbomolecular pumpATH 1600-3200M, ATP 2300M: Magnetic levitation with a pumping speed range of 1400-2800l/sTurbomolecular pumpATH series magnetic levitationMolecular pumpEquipped with a 5-axis magnetic bearing monitoring system and real-time rotor displacement automatic correction function, it ensures long-term stability and reliability, while also running very quietly magnetic suspensionTurbomolecular pumpThe ATH series is widely used in industries such as semiconductors, coatings, and ion etching
Pfeiffermagnetic suspensionTurbomolecular pump ATH 1600-3200M,ATP 2300M advantage
1. Clean and oil-free, high pumping speed
2. Free maintenance and low-cost maintenance fees
3. Turbomolecular pumpExtremely low noise and vibration
4. Can be installed at any angle
P
feiffermagnetic suspensionTurbomolecular pump ATH 1600-3200M,ATP 2300M technical parameter
Molecular pump model |
Molecular pump connection size DN |
Extraction speed l/s |
Compression ratio |
Maximum starting pressure hPa |
extreme pressure |
Full speed gas flow hPa l/s |
Start time |
weight |
|||
Air inlet |
Exhaust port |
nitrogen |
Helium He |
Hydrogen H2 |
nitrogen |
Nitrogen N2 |
hPa |
Nitrogen N2 |
min |
kg |
|
ATH 1603 M ATH 1600 MT |
250 |
40 |
1,400 |
970 |
540 |
> 1X108 |
1.7 |
< 6X10–9 |
67 |
6 |
42 |
ATH 2303 M ATH 2300 MT |
250 |
40 |
2,150 |
1,800 |
1,100 |
> 1X108 |
2.9 |
< 6X10–9 |
67 |
8 |
68 |
ATH 2800 M ATH 2800 MT |
250 |
40 |
2,200 |
2,400 |
1,550 |
> 1X108 |
2.1 |
< 6X10–9 |
84 |
10 |
93 |
ATH 3200 M ATH 3200 MT |
320 |
40 |
2,800 |
2,500 |
1,700 |
> 1X108 |
2.1 |
< 6X10–9 |
84 |
10 |
93 |
ATP 2300 M |
320 |
40 |
1,950 |
2,050 |
1,700 |
> 1X108 |
2.1 |
< 6X10–9 |
37 |
8 |
60 |
The MT model molecular pump is equipped with an integrated heating belt for temperature control Its built-in heating system and water cooling system work together to ensure a relatively constant operating temperature of the pump (maximum operating temperature of 75 ° C), while minimizing the deposition of process chemicals or by-products due to condensation in the pump body
Shanghai Bodong PfeifferTurbomolecular pumpThe pumping speed range is 10 to 2700 L/S, with a maximum speed of 90000 rpm and a maximum ultimate vacuum of 1E-11 mbar. It has a higher compression ratio for small molecule gases, and practical experience has shown that PfeifferTurbomolecular pumpThe running time can reach 100000 hours!Pu Fa Molecular PumpProvide composite bearingsMolecular pumpAnd five axis full maglevMolecular pumpTwo major series meet different applications, recommended for pairingPfeiffer rotary vane pumpandDry pumpShared useRecommended Typical Applications of Molecular Pumps>>
If you need further understandingMolecular pumpFor detailed information, please refer to the following contact information
Shanghai Bodong: Miss Ye Taiwan Bodong: Miss Wang
T: +86-21-5046-3511 ext 109 T: +886-3-567-9508 ext 161
F: +86-21-5046-1490 F: +886-3-567-0049
M: +86 1391-883-7267 M: +886-939-653-958
ec@hakuto-vacuum.cn ec@hakuto.com.tw